![]() ![]() īecause of the large surface area to volume ratio of MEMS, forces produced by ambient electromagnetism (e.g., electrostatic charges and magnetic moments), and fluid dynamics (e.g., surface tension and viscosity) are more important design considerations than with larger scale mechanical devices. They usually consist of a central unit that processes data (an integrated circuit chip such as microprocessor) and several components that interact with the surroundings (such as microsensors). MEMS are made up of components between 1 and 100 micrometres in size (i.e., 0.001 to 0.1 mm), and MEMS devices generally range in size from 20 micrometres to a millimetre (i.e., 0.02 to 1.0 mm), although components arranged in arrays (e.g., digital micromirror devices) can be more than 1000 mm 2. MEMS ( micro-electromechanical systems) is the technology of microscopic devices incorporating both electronic and moving parts. Proposal submitted to DARPA in 1986 first introducing the term "microelectromechanical systems" MEMS microcantilever resonating inside a scanning electron microscope For other uses, see MEMS (disambiguation). ![]()
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